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1 article(s) from Belykh, Sergey

Sputtering of silicon nanopowders by an argon cluster ion beam

Xiaomei Zeng,
Vasiliy Pelenovich,
Zhenguo Wang,
Wenbin Zuo,
Sergey Belykh,
Alexander Tolstogouzov,
Dejun Fu and
Xiangheng Xiao

Beilstein J. Nanotechnol. 2019, 10, 135–143, doi:10.3762/bjnano.10.13

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Figure 1: Mass spectra of the argon cluster beam ionized by electrons with the energies of 17 and 150 eV. The...

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Figure 2: Sputtering yield versus the average density of the pressed nanopowder. Data on bulk Si is also show...

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Figure 3: The sputtering depth (a) and sputtering yield (b) dependence on the ion dose of the nanopowder Si i...

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Figure 4: The roughness of the Si nanopowder versus the ion dose at different energies. The dashed line repre...

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Figure 5: AFM images of the Si nanopowder surface before (a) and after irradiation by the cluster beam at an ...

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Figure 6: The sputtering depth (a) and sputtering yield (b) dependence of the Si nanopowder and bulk Si on en...

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Figure 7: The roughness of the nanopowder Si versus the energy at different ion doses. The broken line repres...

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Published 10 Jan 2019

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